✦ LIBER ✦
Part 2b—deposited dielectrics for VLSI : Werner Kern. Semiconductor Int. 122 (July 1985)
- Publisher
- Elsevier Science
- Year
- 1986
- Tongue
- English
- Weight
- 123 KB
- Volume
- 26
- Category
- Article
- ISSN
- 0026-2714
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