High-Resolution, Parallel Patterning of
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Sukbeom You; Kyuhee Han; Hyoungchul Kim; Heechul Lee; Chang Gyu Woo; Changui Jeo
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Article
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2010
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John Wiley and Sons
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English
⚖ 962 KB
## Abstract An ion‐induced focusing mask under the simultaneous injection of ions and charged aerosols generates invisible electrostatic lenses around each opening, through which charged nanoparticles are convergently guided without depositing on the mask surface. The sizes of the created features