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Oxygen profiling in Czochralski-grown silicon substrates submitted to a rapid thermal annealing by using charged particles activation analysis
✍ Scribed by H. Erramli; M.A. Misdaq; G. Blondiaux; C. Maddalon-Vinante; D. Barbier
- Book ID
- 114171072
- Publisher
- Elsevier Science
- Year
- 1998
- Tongue
- English
- Weight
- 138 KB
- Volume
- 145
- Category
- Article
- ISSN
- 0168-583X
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