Oxygen plasma pre-treatments for high quality homoepitaxial CVD diamond deposition

3D crystal growth model for understandin

3D crystal growth model for understanding the role of plasma pre-treatment on CVD diamond crystal shape

✍ Silva, F. ;Achard, J. ;Bonnin, X. ;Michau, A. ;Tallaire, A. ;Brinza, O. ;Gicquel 📂 Article 📅 2006 🏛 John Wiley and Sons 🌐 English ⚖ 295 KB

## Abstract The progress that has been achieved over the past few years on the growth of thick and high purity homo‐epitaxial single crystal diamond by chemical vapour deposition (CVD) has opened a wide range of possible applications in areas such as optics or power electronics. Recently, high qual