✦ LIBER ✦
Oxygen plasma and high pressure H2O vapor heat treatments used to fabricate polycrystalline silicon thin film transistors
✍ Scribed by H. Watakabe; T. Sameshima
- Publisher
- Springer
- Year
- 2003
- Tongue
- English
- Weight
- 487 KB
- Volume
- 77
- Category
- Article
- ISSN
- 1432-0630
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