Oxygen in Silicon

✍ Scribed by R.K. Willardson, Albert C. Beer and Eicke R. Weber (Eds.)

• Publisher: Academic Press
• Year: 1994
• Tongue: English
• Leaves: 711
• Series: Semiconductors and Semimetals 42
• Category: Library

✦ Synopsis

This volume reviews the latest understanding of the behavior and roles of oxygen in silicon, which will carry the field into the ULSI era from the experimental and theoretical points of view. The fourteen chapters, written by recognized authorities representing industrial and academic institutions, cover thoroughly the oxygen related phenomena from the crystal growth to device fabrication processes, as well as indispensable diagnostic techniques for oxygen. Key Features Comprehensive study of the behavior of oxygen in silicon Discusses silicon crystals for VLSI and ULSI applications Thorough coverage from crystal growth to device fabrication Edited by technical experts in the field Written by recognized authorities from industrial and academic institutions Useful to graduate students, scientists in other disciplines, and active participants in the arena of silicon-based microelectronics research* 297 original line drawings

✦ Table of Contents

Content:
Semiconductors and Semimetals
Page ii

Oxygen in Silicon
Page iii

Copyright page
Page iv

List of Contributors
Pages xiii-xiv

Preface
Pages xv-xvi
Fumio Shimura

Chapter 1 Introduction to Oxygen in Silicon Original Research Article
Pages 1-8
F. Shimura

Chapter 2 The Incorporation of Oxygen into Silicon Crystals Original Research Article
Pages 9-52
Wen Lin

Chapter 3 Characterization Techniques for Oxygen in Silicon Original Research Article
Pages 53-93
T.J. Shaffner, D.K. Schroder

Chapter 4 Oxygen Concentration Measurement Original Research Article
Pages 95-152
W.M. Bullis

Chapter 5 Intrinsic Point Defects in Silicon Original Research Article
Pages 153-190
S.M. Hu

Chapter 6 Some Atomic Configurations of Oxygen Original Research Article
Pages 191-249
B. Pajot

Chapter 7 Electrical Properties of Oxygen in Silicon Original Research Article
Pages 251-287
J. Michel, L.C. Kimerling

Chapter 8 Diffusion of Oxygen in Silicon Original Research Article
Pages 289-352
R.C. Newman, R. Jones

Chapter 9 Mechanisms of Oxygen Precipitation: Some Quantitative Aspects Original Research Article
Pages 353-390
T.Y. Tan, W.J. Taylor

Chapter 10 Simulation of Oxygen Precipitation Original Research Article
Pages 391-447
M. Schrems

Chapter 11 Oxygen Effect on Mechanical Properties Original Research Article
Pages 449-511
K. Sumino, I. Yonenaga

Chapter 12 Grown-in and Process-Induced Defects Original Research Article
Pages 513-575
W. Bergholz

Chapter 13 Intrinsic/Internal Gettering Original Research Article
Pages 577-617
F. Shimura

Chapter 14 Oxygen Effect on Electronic Device Performance Original Research Article
Pages 619-667
H. Tsuya

Index
Pages 669-679