✦ LIBER ✦
Oxygen implantation through patterned masks: a method for forming insulated silicon device islands while maintaining a planar wafer surface
✍ Scribed by U. Bussmann; P.L.F. Hemment; A.K. Robinson; V.V. Starkov
- Book ID
- 113282494
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 719 KB
- Volume
- 55
- Category
- Article
- ISSN
- 0168-583X
No coin nor oath required. For personal study only.