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Oxygen distribution in the heteroepitaxially grown Y2O3 films on Si substrates

✍ Scribed by H.B. Kim; M.H. Cho; S.W. Whangbo; C.N. Whang; S.C. Choi; W.K. Choi; J.H. Song; S.O. Kim


Book ID
114170328
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
109 KB
Volume
142
Category
Article
ISSN
0168-583X

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