✦ LIBER ✦
Oxygen content increasing mechanism in Czochralski (CZ) silicon crystals doped with heavy antimony under a double-typed heat shield
✍ Scribed by Do Won Song; Sang Hun Lee; Young Hee Mun; Hyo Kim
- Book ID
- 108166354
- Publisher
- Elsevier Science
- Year
- 2011
- Tongue
- English
- Weight
- 793 KB
- Volume
- 325
- Category
- Article
- ISSN
- 0022-0248
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