Oxygen and chlorine evolution on niobium-, zirconium- and other metal-nitride amorphous thin film electrodes prepared by the reactive RF sputtering technique

✍ Scribed by Masashi Azuma; Yoshihiro Nakato; Hiroshi Tsubomura

• Publisher: Elsevier Science
• Year: 1988
• Weight: 697 KB
• Volume: 255
• Category: Article
• ISSN: 0022-0728
• DOI: 10.1016/0022-0728(88)80013-5