𝔖 Bobbio Scriptorium
✦   LIBER   ✦

Oxide grain growth and the Er2O3Ta interface

✍ Scribed by C.D. Wirkus; D.R. Wilder


Book ID
107827108
Publisher
Elsevier Science
Year
1977
Weight
454 KB
Volume
30
Category
Article
ISSN
0025-5416

No coin nor oath required. For personal study only.


📜 SIMILAR VOLUMES


Interface and oxide properties of rf spu
✍ T Dimitrova; E Atanassova 📂 Article 📅 1998 🏛 Elsevier Science 🌐 English ⚖ 201 KB

Interface and oxide properties of Ta 2 O 5 -Si structures with rf sputtered Ta 2 O 5 of 7-80 nm thickness have been investigated using capacitors on p-Si and transistor-like test structures. It is found tha the electrical properties of the films are dominated by an extremely thin SiO 2 layer which i