✦ LIBER ✦
Oxide breakdown decrease by oxide growth projection of implantation-caused stacking faults — A characterization case study using atomic force microscopy
✍ Scribed by P. Jacob; K. Hoeppner
- Publisher
- Elsevier Science
- Year
- 1996
- Tongue
- English
- Weight
- 324 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0026-2714
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