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Oxidation of sputtered molybdenum silicide thin films

✍ Scribed by Inoue, Tomoyasu; Koike, Katsuo


Book ID
120063923
Publisher
American Institute of Physics
Year
1978
Tongue
English
Weight
139 KB
Volume
33
Category
Article
ISSN
0003-6951

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πŸ“œ SIMILAR VOLUMES


Oxidation of silicide thin films: TiSi2
✍ dҀ™Heurle, F. πŸ“‚ Article πŸ“… 1983 πŸ› American Institute of Physics 🌐 English βš– 442 KB