✦ LIBER ✦

Oxidation of silicon nitride in a wet atmosphere

✍ Scribed by Minoru Maeda; Kazuo Nakamura; Tsutomu Ohkubo

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Oxidation of sintered silicon nitride

✍ Chuan He; Ling Wang; Jianguang Wu 📂 Article 📅 1993 🏛 Springer 🌐 English ⚖ 578 KB

The structure of silicon nitride films.

✍ Edelman, F. L. 📂 Article 📅 1979 🏛 John Wiley and Sons 🌐 English ⚖ 446 KB

High temperature oxidation of silicon ni

✍ E.A. Pugach 📂 Article 📅 1985 🏛 Elsevier Science 🌐 English ⚖ 224 KB

Oxidation mechanism of porous silicon ni

✍ F. Porz; F. Thümmler 📂 Article 📅 1984 🏛 Springer 🌐 English ⚖ 723 KB

Oxidation processes in silicon-nitride-b

✍ M. Pomeroy; S. Hamsphire 📂 Article 📅 1989 🏛 Elsevier Science 🌐 English ⚖ 574 KB

Effects of wet oxidation on the electric

✍ Eun Gu Lee; Jae Sung Roh; Ho Bin Im 📂 Article 📅 1991 🏛 Elsevier Science 🌐 English ⚖ 544 KB