✦ LIBER ✦
Oxidation of silicon in r.f. plasma measured by rapid in situ during process ellipsometry
✍ Scribed by H. Shinno; M. Kitajima
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 306 KB
- Volume
- 228
- Category
- Article
- ISSN
- 0040-6090
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