Oxidation of hydrogen-passivated silicon surfaces induced by dissociative electron attachment to physisorbed H2O

✍ Scribed by D Klyachko; P Rowntree; L Sanche

• Book ID: 116068101
• Publisher: Elsevier Science
• Year: 1996
• Tongue: English
• Weight: 717 KB
• Volume: 346
• Category: Article
• ISSN: 0039-6028
• DOI: 10.1016/0039-6028(95)95066-4