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Oxidation behaviour of FeAl intermetallic coatings produced by magnetron sputter deposition

✍ Scribed by Zhenyu Liu; Wei Gao; Fuhui Wang

Book ID
114388580
Publisher
Elsevier Science
Year
1998
Tongue
English
Weight
265 KB
Volume
39
Category
Article
ISSN
1359-6462

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The paper presents the results obtained on the deposition and characterization of niobium carbide thin films obtained by reactive magnetron sputtering method in a reactive atmosphere composed by Ar and CH 4 . The coatings were deposited on Si substrates, at 100 Β°C, 400 Β°C and 750 Β°C, at two differen