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Oxidation behavior of AlN in the presence of oxide and glass for thick film applications

✍ Scribed by Yamaguchi, T.; Kageyama, M.

Book ID: 117872632
Publisher: IEEE
Year: 1989
Tongue: English
Weight: 350 KB
Volume: 12
Category: Article
ISSN: 0148-6411
DOI: 10.1109/33.35489

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