✦ LIBER ✦
Oxidation-based wet-etching method for AlGaN/GaN structure with different oxidation times and temperatures
✍ Scribed by Liu, Yang; Wang, Jin-Yan; Xu, Zhe; Cai, Jin-Bao; Wang, Mao-Jun; Yu, Min; Xie, Bing; Wu, Wen-Gang
- Book ID
- 121613647
- Publisher
- Nonferrous Metals Society of China
- Year
- 2013
- Tongue
- English
- Weight
- 415 KB
- Volume
- 34
- Category
- Article
- ISSN
- 1001-0521
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