✦ LIBER ✦
Over-range behavior of sealed-cavity polysilicon pressure sensors
✍ Scribed by K.H.-L. Chau; C.D. Fung; P.R. Harris; J.G. Panagou
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 442 KB
- Volume
- 28
- Category
- Article
- ISSN
- 0924-4247
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