Output and picosecond amplification characteristics of an efficient and high-power discharge excimer laser

✍ Scribed by Kenzo Miyazaki; Toru Fukatsu; Ichiro Yamashita; Toshifumi Hasama; Kawakatsu Yamada; Takuzo Sato

• Publisher: Springer
• Year: 1991
• Tongue: English
• Weight: 1018 KB
• Volume: 52
• Category: Article
• ISSN: 0721-7269
• DOI: 10.1007/bf00405678

✦ Synopsis

Improvements in output pulse energy and efficiency of a conventional capacitortransfer-type discharge excimer laser with automatic preionization have been achieved by extending the discharge volume and resulting moderate pumping of the active medium. The discharge laser produces a pulse energy of more than 1 .~ for XeC1, KrF, and ArF lasers in square beams of about 2 x 2 cm 2, and the maximum overall efficiency observed is 2.9% for XeC1, 3.2% for KrF and 1.8% for ArF. The laser device has been involved in a picosecond (~ 32 ps) XeC1 laser amplification system, and was operated as an amplifier at a repetitive frequency of 10Hz. Saturation fluence for XeC1 laser was measured to be 1.4 mJ/cm 2, and the picosecond pulse energy of ~ 40 mJ was extracted from the amplifier.