✦ LIBER ✦
Outdiffusion modelling of arsenic from As+ implanted crystalline p-type silicon during rapid thermal annealing
✍ Scribed by S.N. Kumar; G. Chaussemy; B. Cauut; D. Barbier; A. Laugier
- Publisher
- Elsevier Science
- Year
- 1989
- Tongue
- English
- Weight
- 502 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0169-4332
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