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Out-of-plane refractive microlens fabricated by surface micromachining

✍ Scribed by King, C.R.; Lin, L.Y.; Wu, M.C.

Book ID: 119785690
Publisher: IEEE
Year: 1996
Tongue: English
Weight: 474 KB
Volume: 8
Category: Article
ISSN: 1041-1135
DOI: 10.1109/68.536651

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