Out-of-plane ellipsometry measurements of nanoparticles on surfaces for thin film coated wafer inspection

✍ Scribed by Cheng-Yang Liu; Tze-An Liu; Wei-En Fu

• Publisher: Elsevier Science
• Year: 2010
• Tongue: English
• Weight: 1001 KB
• Volume: 42
• Category: Article
• ISSN: 0030-3992
• DOI: 10.1016/j.optlastec.2010.01.007