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Origin of the nitrogen over- and understoichiometry in Ti0.5Al0.5N thin films

✍ Scribed by Baben, Moritz to; Raumann, Leonard; Music, Denis; Schneider, Jochen M


Book ID
111903166
Publisher
Institute of Physics
Year
2012
Tongue
English
Weight
306 KB
Volume
24
Category
Article
ISSN
0953-8984

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