✦ LIBER ✦
orientation measurement of Al(111) planes in Al-Si-Cu interconnection layers by the image-plating glancing-angle x-ray diffraction method
✍ Scribed by Taira Kitamura; Tohru Hara; Tomohisa Okuda; Kiyotaka Shinada; Yosihiro Kino
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 503 KB
- Volume
- 79
- Category
- Article
- ISSN
- 8756-663X
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