✦ LIBER ✦

Organochromium precursors for low-temperature OMCVD of chromium-based coatings

✍ Scribed by F Maury

Publisher: John Wiley and Sons
Year: 1992
Tongue: English
Weight: 638 KB
Volume: 6
Category: Article
ISSN: 0268-2605
DOI: 10.1002/aoc.590060804

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Low-temperature MOCVD of chromium carbon

Low-temperature MOCVD of chromium carbonitride coatings from tetrakis(diethylamido)chromium and pyrolysis mechanism of this single-source precursor

✍ Francis Maury; Franco Ossola 📂 Article 📅 1998 🏛 John Wiley and Sons 🌐 English ⚖ 220 KB

Amorphous chromium carbonitride coatings with a low nitrogen content (3-8 at%) were deposited by low-pressure MOCVD in the temperature range 573-793 K using Cr(NEt 2 ) 4 as single-source precursor. This poor nitrogen incorporation is in agreement with the trends predicted by thermochemical calculati

Evaluation of tetra-alkylchromium precur

Evaluation of tetra-alkylchromium precursors for organometallic chemical vapor deposition II: Unusual low temperature chromium carbide deposition from Cr[C(CH3)3]4

✍ F. Maury; F. Ossola 📂 Article 📅 1992 🏛 Elsevier Science 🌐 English ⚖ 566 KB