## Abstract The formation process of ordered macropores in a prepatterned pβtype silicon wafer was investigated. FEβSEM observation focusing on the early stage of the pore growth clarified the twoβstep process of macropore formation, whose first step was isotropic pore expansion from prepared etch
β¦ LIBER β¦
Ordering and Disordering of Macropores Formed in Prepatterned p-Type Silicon
β Scribed by Okayama, Haruaki; Fukami, Kazuhiro; Plugaru, Rodica; Sakka, Tetsuo; Ogata, Yukio H.
- Book ID
- 118029141
- Publisher
- The Electrochemical Society
- Year
- 2010
- Tongue
- English
- Weight
- 673 KB
- Volume
- 157
- Category
- Article
- ISSN
- 0013-4651
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