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Optimum sputtering conditions on the in-situ growth of superconducting YBa2Cu3Oy films with an off-axis RF sputtering configuration

โœ Scribed by L.M. Wang; H.W. Yu; H.C. Yang; H.E. Horng


Book ID
108025005
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
847 KB
Volume
256
Category
Article
ISSN
0921-4534

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Growth of a-axis oriented YBa2Cu3O7-x th
โœ Yong Ki Park; Dong Han Ha; Keunseop Park; Jong-Chul Park ๐Ÿ“‚ Article ๐Ÿ“… 1994 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 190 KB

YBa,Cu,O,\_x superconducting thin films with a-axis perpendicular to the substrate were grown on both LaSrGaO, (100) and SrTiO, (100) single crystals by off-axis rf sputtering and their properties were compared. The film grown at 740 "C on a self-template layer grown in situ at 650 "C on LaSrGaO, (1