Optimum beam size for high-speed drawing of LSI patterns by variably shaped rectangular electron beams

✍ Scribed by Koitiro Hoh; Sugiyama, N.; Tarui, Y.

• Book ID: 114593112
• Publisher: IEEE
• Year: 1979
• Tongue: English
• Weight: 350 KB
• Volume: 26
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/t-ed.1979.19608