✦ LIBER ✦
Optimized surface silylation of chemically amplified epoxidized photoresists for micromachining applications
✍ Scribed by D. Kontziampasis; K. Beltsios; E. Tegou; P. Argitis; E. Gogolides
- Publisher
- John Wiley and Sons
- Year
- 2010
- Tongue
- English
- Weight
- 854 KB
- Volume
- 117
- Category
- Article
- ISSN
- 0021-8995
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