✦ LIBER ✦
Optimization of the filament arrangement at constant radiant heat in HW-CVD for the preparation of compact μc-Si:H at high deposition rates
✍ Scribed by J. Lossen; S. Klein; F. Finger
- Book ID
- 113936531
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 140 KB
- Volume
- 451-452
- Category
- Article
- ISSN
- 0040-6090
No coin nor oath required. For personal study only.