✦ LIBER ✦
Optimization of the electron-beam-lithography parameters for the moth-eye effects of an antireflection matrix structure
✍ Scribed by Chung-Feng Jeffrey Kuo; Hung-Min Tu; Te-Li Su
- Publisher
- John Wiley and Sons
- Year
- 2006
- Tongue
- English
- Weight
- 496 KB
- Volume
- 102
- Category
- Article
- ISSN
- 0021-8995
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