Optimization of gate oxide N2O anneal for CMOSFET's at room and cryogenic temperatures

✍ Scribed by Zhi-Jian Ma; Zhi Hong Liu; Krick, J.T.; Huang, H.J.; Cheng, Y.C.; Chenming Hu; Ko, P.K.

• Book ID: 114535786
• Publisher: IEEE
• Year: 1994
• Tongue: English
• Weight: 898 KB
• Volume: 41
• Category: Article
• ISSN: 0018-9383
• DOI: 10.1109/16.297731