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Optimization of FIB milling for rapid NEMS prototyping

✍ Scribed by Bjarke Malm; Dirch H. Petersen; Anders Lei; Timothy J. Booth; Lasse V. Homann; Peter Bøggild

Publisher: Elsevier Science
Year: 2011
Tongue: English
Weight: 593 KB
Volume: 88
Category: Article
ISSN: 0167-9317
DOI: 10.1016/j.mee.2010.11.049

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