Optimization of coating uniformity in an ion beam sputtering system using a modified planetary rotation method

✍ Scribed by Gross, Mark ;Dligatch, Svetlana ;Chtanov, Anatoli

• Book ID: 115357016
• Publisher: The Optical Society
• Year: 2011
• Tongue: English
• Weight: 807 KB
• Volume: 50
• Category: Article
• ISSN: 1559-128X
• DOI: 10.1364/AO.50.00C316