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Optimization of ClusterCarbon™ process parameters for strained Si lattice

✍ Scribed by Karuppanan Sekar; Wade A. Krull; Thomas N. Horsky; Thomas Feudel; Christian Krüger; Stefan Flachowsky; Ina Ostermay

Book ID
108215597
Publisher
Elsevier Science
Year
2008
Tongue
English
Weight
771 KB
Volume
154-155
Category
Article
ISSN
0921-5107

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