✦ LIBER ✦
Optimization of Al-CVD process based on elementary reaction simulation and experimental verification: From the growth rate to the surface morphology
✍ Scribed by Masakazu Sugiyama; Tomohisa Iino; Tohru Nakajima; Takeshi Tanaka; Yasuyuki Egashira; Kohichi Yamashita; Hiroshi Komiyama; Yukihiro Shimogaki
- Book ID
- 108288919
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 136 KB
- Volume
- 498
- Category
- Article
- ISSN
- 0040-6090
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