✦ LIBER ✦
Optimisation of the RF power density to obtain good quality hydrogenated amorphous silicon films in a home-made glow discharge system
✍ Scribed by Akın Bacıoğlu; Alp Osman Kodolbaş; Özcan Öktü
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 267 KB
- Volume
- 25
- Category
- Article
- ISSN
- 0925-3467
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