Optimisation of discharge parameters for the analysis of high purity silicon wafers by magnetic sector glow discharge mass spectrometry

✍ Scribed by Dafydd M. P. Milton; Robert C. Hutton; Gerry A. Ronan

• Book ID: 112379622
• Publisher: Springer
• Year: 1992
• Tongue: English
• Weight: 426 KB
• Volume: 343
• Category: Article
• ISSN: 1618-2650
• DOI: 10.1007/bf00633565