✦ LIBER ✦
Optimal materials and process conditions of functional layers for piezoelectric MEMS process at high temperature
✍ Scribed by Dong-Yeon Lee; Jaesool Shim; Tae Song Kim; Jae Hong Park
- Book ID
- 114461557
- Publisher
- The Institution of Engineering and Technology
- Year
- 2011
- Tongue
- English
- Weight
- 633 KB
- Volume
- 6
- Category
- Article
- ISSN
- 1750-0443
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