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Optimal control of force microscope cantilevers. I. Controller design

โœ Scribed by Garbini, J. L.; Bruland, K. J.; Dougherty, W. M.; Sidles, J. A.


Book ID
118020116
Publisher
American Institute of Physics
Year
1996
Tongue
English
Weight
408 KB
Volume
80
Category
Article
ISSN
0021-8979

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The purpose of this paper is to develop an efficient numerical method for finding the optimal bending stiffness distribution of an elastically supported distributed-parameter cantilever under a fundamental natural frequency constraint. The distributed-parameter cantilever is modeled by an FEM system