✦ LIBER ✦
Optically driven microelectromechanical-system deformable mirror under high-frequency AC bias
✍ Scribed by Khoury, J.; Drehman, A.; Woods, C. L.; Haji-Saeed, B.; Sengupta, S. K.; Goodhue, W.; Kierstead, J.
- Book ID
- 115428329
- Publisher
- Optical Society of America
- Year
- 2006
- Tongue
- English
- Weight
- 121 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0146-9592
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