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Optical waveguides in Sn2P2S6 by low fluence MeV He+ ion implantation

✍ Scribed by Guarino, Andrea; Jazbinšek, Mojca; Herzog, Christian; Degl’Innocenti, Riccardo; Poberaj, Gorazd; Günter, Peter

Book ID
115405265
Publisher
Optical Society of America
Year
2006
Tongue
English
Weight
338 KB
Volume
14
Category
Article
ISSN
1094-4087

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The X-cut, Y-propagation LiNbO 3 crystals were implanted by 2.8 MeV P þ ions with doses of $1 Â 10 14 ions/cm 2 at room temperature. Planar optical waveguides were formed by P + implantation at doses of 1 Â 10 14 , 2 Â 10 14 , 3 Â 10 14 and 4 Â 10 14 ions/cm 2 . Contrary to high-dose ion-implanted w