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Optical waveguide with homogeneous refractive index profile in LiNbO3 by double-low-energy Oxygen ion implantation

โœ Scribed by S.-M. Zhang; K.-M. Wang; X.-H. Liu; X.-B. Ming


Book ID
116244469
Publisher
Elsevier Science
Year
2011
Tongue
English
Weight
612 KB
Volume
257
Category
Article
ISSN
0169-4332

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The X-cut, Y-propagation LiNbO 3 crystals were implanted by 2.8 MeV P รพ ions with doses of $1 ร‚ 10 14 ions/cm 2 at room temperature. Planar optical waveguides were formed by P + implantation at doses of 1 ร‚ 10 14 , 2 ร‚ 10 14 , 3 ร‚ 10 14 and 4 ร‚ 10 14 ions/cm 2 . Contrary to high-dose ion-implanted w