✦ LIBER ✦
Optical, vibrational and compositional study of amorphous silicon oxynitride thin films grown by an RF plasma using N2O + SiH4 gas mixtures
✍ Scribed by J. Campmany; J.L. Andújar; A. Canillas; J. Costa; E. Bertran
- Publisher
- Elsevier Science
- Year
- 1993
- Tongue
- English
- Weight
- 361 KB
- Volume
- 70-71
- Category
- Article
- ISSN
- 0169-4332
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