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Optical thin films for gas sensing

✍ Scribed by M.G. Baron; R. Narayanaswamy; S.C. Thorpe


Publisher
Elsevier Science
Year
1993
Tongue
English
Weight
147 KB
Volume
14
Category
Article
ISSN
0925-4005

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In this report are summarized the results of our investigations of gas sensors, based on thin films of metal oxides and multilayer structures, carried out by using surface analysis techniques during the last few years. For the studies of surface chemical composition and its variation in depth, the f