Optical system with 4 μm resolution for maskless lithography using digital micromirror device

✍ Scribed by Lee, Dong Hee (author)

• Book ID: 115400500
• Publisher: Korean Journal of Optics and Photonics
• Year: 2010
• Tongue: English
• Weight: 914 KB
• Volume: 14
• Category: Article
• ISSN: 1226-4776
• DOI: 10.3807/JOSK.2010.14.3.266