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Optical study of microvoids, voids, and local inhomogeneities in amorphous silicon

โœ Scribed by Vanecek, M.; Holoubek, J.; Shah, A.


Book ID
120461418
Publisher
American Institute of Physics
Year
1991
Tongue
English
Weight
603 KB
Volume
59
Category
Article
ISSN
0003-6951

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The d.c. conductivity of vacuum evaporated amorphous silicon f'rims has been measured. A model based on the properties of (111) surface states of cleaved crystalline Si is used to interpret this data as well as other data found in literature. FILMS of amorphous Si evaporated or sputtered onto room