✦ LIBER ✦
Optical proximity correction for a versatile LCD based direct write maskless photoplotter
✍ Scribed by M.V. Kessels; K. Heggarty
- Publisher
- Elsevier Science
- Year
- 2009
- Tongue
- English
- Weight
- 518 KB
- Volume
- 86
- Category
- Article
- ISSN
- 0167-9317
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